DH <Fairy> Series
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■Fully-automatic vacuum baking equipment for high-vacuum, high-temperature
DH-DP type: Oil diffusion pump exhaust system, x10–3 Pa
DH-TP type: Turbo-molecular pump exhaust system, x10–4 Pa
The fully-automatic DH Series vacuum baking equipment is designed and manufactured to function as production machinery. In addition to meeting requirements for production line reliability, safety, and operability, this equipment enables high-temperature processing up to 650℃. In addition to different ultimate pressures, the DH-DP and DH-TP types feature different pumps: oil diffusion or turbo-molecular. Select the type that best meets your needs, including the degree of cleaning required.
DH-DP/DH-TP
DH-DP type  |
DH-TP type  |
Features
■DH-DP type
The DH-DP type incorporates an oil-sealed rotary vacuum pump and oil diffusion pump and provides an ultimate pressure of x10-3 Pa. Offers an alternative to the DH-TP type, providing high vacuum atmospheres at lower cost.
■DH-TP type
Incorporating an oil-sealed rotary vacuum pump or dry pump, and turbo-molecular pump, the DHTP type provides an ultimate pressure of x10-4 Pa. Of all our vacuum baking series types, it boasts the most powerful vacuum and the cleanest heating environment.
■Heating mechanism
High temperatures are achieved inside the vacuum chamber by an internal heating system in which sheath micro-heaters attached to the underside of each shelf board function as heating sources. Depending on the type of workpiece, heaters can also be attached to the inside wall surfaces of the chamber. With either system, compared to external heating systems, the internal heating system reduces the time required to heat the chamber to the specified temperature and ensures superior temperature distributions within the chamber.
■Heating control
PID control is performed by individual temperature controllers provided for each of the heaters installed in the chamber, ensuring accurate, reliable temperature control. Additionally, programmable controllers can be used to specify heating patterns.
■Operability
The DH Series types are easy to use and can be operated by anyone. Simply press the Start button to turn the system on and activate the sequencer program for automatic functions such as vacuum exhaust, heating, and valve opening and closing. The device system configuration and On/Off status of each of the devices are displayed on the graphic panel for easy confirmation of operating status. Various interlock functions are provided to prevent erroneous operations at each separate stage.
■Safety
If an equipment malfunction is detected during automatic operations, the system either halts all operations or specific functions, depending on the type of malfunction (a drop in cooling water amount or air pressure, overheating, and so forth), using the lamps on the graphic panel to indicate the type of malfunction. The system features a comprehensive range of safeguards.
In the event of a power failure, for example, the main valve closes to maintain pressure in the vacuum heating chamber (to prevent oxidation of workpieces due to atmospheric leaks), while the pump leak valve opens to prevent backflow of pump oil.
■Optional forced cooling function dramatically reduces processing times
Since vacuums serve as superior insulators, heat dissipation can take a very long time. Even when the heaters are turned off following heat treatment, it takes a long time for temperatures to drop to around 50℃ ,at which workpieces can be removed. The optional forced cooling function dramatically reduces the time required for temperatures to drop, thereby significantly reducing total processing times.
Applications
The DH Series is widely used in production line processes, including vacuum baking of semiconductor components and components for precision/electronic devices, electronic materials, metals, ceramics, laser device components, and plasma electrodes.
Specifications
| Model | Internal dimensions of chamber (W✕D✕Hmm) | Shelves/Heaters | Temperarure controller | Exhaust system | |
|---|---|---|---|---|---|
| DH-40 | DP | 400✕400✕400 | 3 / 4 | 4 | RP500L/min+DP6B |
| TP | RP500L/min+TMP300 | ||||
| DH-50 | DP | 500✕500✕500 | 4 / 5 | 5 | RP500L/min+DP6B |
| TP | RP500L/min+TMP520 | ||||
| DH-60 | DP | 600✕600✕600 | 4 / 5 | 5 | RP650L/min+DP6B |
| TP | RP650L/min+TMP520 | ||||
| DH-70 | DP | 700✕700✕700 | 4 / 5 | 5 | RP1500L/min+DP10B |
| TP | RP960L/min+TMP900 | ||||
| DH-80 | DP | 800✕800✕800 | 5 / 6 | 6 | RP1500L/min+DP14B |
| TP | RP1500L/min+TMP1300 | ||||
| DH-100 | DP | 1000✕1000✕1000 | 5 / 6 | 6 | RP1500L/min+DP14B |
| TP | RP1500L/min+TMP2000 | ||||
| DH-150 | DP | 1500✕1500✕1500 | 5 / 6 | 6 | RP3000L/min+DP22B |
| TP | RP3000L/min+TMP3400 | ||||
Specifications for DH
| Model | DH-DP | Exhaust system: Oil-sealed rotary vacuum pump and Oil diffusion pump | |
|---|---|---|---|
| DH-TP | Exhaust system: Oil-sealed rotary vacuum pump and Turbo-molecular pump | ||
| Style | Heating | Internal heating system (shelf boards or internal surfaces) | |
| Cooling | Vacuum cooling, N2 forced circulation cooling (option) | ||
| Performance | Maximum temperature range | 300℃ to 650℃ | |
| Ultimate pressure | DH-□DP: In the order of x10‒3Pa (after bakeout at no-load normal operating temperature) | ||
| DH-□TP: In the order of x10‒4Pa (after bakeout at no-load normal operating temperature) | |||
| Configuration | Interior/Exterior | Polished stainless steel (SUS304)/Coated rolled steel | |
| Door/Sealing material | Single-swing door opening: clamp latch/Viton O-rings | ||
| Heat insulating material | Alumina-silica blankets/Flanges and door O-ring section: water-cooling tubes provided | ||
| Heating system | Internal heater panels (incorporated into the shelf boards or mounted on the inner wall surfaces; sheath heaters provided ) |
||
| Temperature control system | Programmable temperature controller or Fixed temperature controller: PID control | ||
| Vacuum exhaust system*1 | Oil-sealed rotary vacuum pump and Oil diffusion pump: DH-□DP | ||
| Oil-sealed rotary vacuum pump and Turbo-molecular pump: DH-□TP | |||
| Vacuum gauge | BA gauge (ionization vacuum gauge), Pirani vacuum gauge, Digital compound pressure gauge | ||
| Control panel*2 | Incorporated into the stand or stand-alone | ||
| Operation | Operation | Automatic/Manual, switch-selectable | |
| Display | Operating status | Display of device system on the graphic panel, display of device ON/OFF status | |
| Temperature | LED digital display | ||
| Temperature patterns | Programmable temperature controller: 30 patterns, 300 segments | ||
| Functions | Vacuum exhaust | Sequencer program used for automatic operation | |
| Heating/Cooling*3 | Fixed operation: automatic operation at the specified temperature/start of cooling at the specified timer setting | ||
| Programmed operation: heating/cooling as specified by the input pattern | |||
| Safety device: Interlock | Vacuum exhaust malfunction, Overheating prevention, Motor overload, A drop in the amount of cooling water, A drop in the operating air pressure, Earth leakage breaker | ||
| Standards | Power supply | 3φ 200V 50/60Hz | |
| Cooling water | Equipment inlet: At least 0.2 MPa 30 to 60 L/min | ||
| Air | Equipment inlet: At least 0.5 Mpa | ||
| Options | WS Series oil cleaner, Cold trap | ||
*2. Control panel: Incorporated into the stand if the inner volume is 1m3 or less;stand-alone if the inner volume is 1.2m3 or greater.
*3. Fixed temperature control: An external timer (located on the control panel) is used to specify the duration for which the specified temperature is maintained. The cooling process starts when the specified duration elapses.
*We can manufacture custom models to specifications.
